Coating technologies and thin film anaytics

In IWS various coating technologies are available for the development of nanometer thin films for EUV and X-ray mirrors. Depending on the materials that have to be coated and depending on the properties of the optics, different technologies are used:

For a successful development of coating processes appropriate analytical techniques and tools are mandatory. The following information has to be determined:

  • layer thickness and densities
  • microstructure of the layers
  • surface roughness
  • reflection spectra, reflectance values
  • internal stress of the coatings
  • figure of optical surfaces

Precision coating


Ion Beam Sputter Deposition (IBSD)


Magnetron Sputter Deposition (MSD)


Pulsed Laser Deposition (PLD)