Fraunhofer Institute for Material and Beam Technology IWS
Concentration curves of involved gas species, gained by the help of FTIR spectroscopy
FTIR gas analytics systems for the time-resolved determination of gas atmospheres and the concentration flow of the gas species (precursors, intermediate) even in highly particle loaded atmospheres. The system has been developed for applications in CVD coating and etching industries as well as in the semi-conducting industry.