Fraunhofer Institute for Material and Beam Technology IWS
IRspecXL- measuring device for infra-red spectroscopic investigations of surface- and film systems
The measuring device for the infra-red spectroscopic investigation is very suitable for the analysis of very large samples such as wafers and components. Using different reflection spectra, this non-contact and non-destructive measuring technique delivers statements about chemical bonds, phase compositions, carrier concentrations, about optical properties and film morphology.