Composite coating system (OLGA)

PVD-Development: Composite coating system electron beam and high-current arc (OLGA)

Composite electron beam coating system and high-current arc (OLGA)
© Fraunhofer IWS
Composite electron beam coating system and high-current arc (OLGA)
Example: Titanium-coating
© Fraunhofer IWS
Example: Titanium-coating

Manufacturer

  • Metaplas Ionon, Bergisch-Gladbach / von Ardenne Anlagentechnik, Dresden


Coating process

  • Thermal evaporation
  • Electron beam evaporation
  • Vacuum arc coating


Technical data

  • Chamber: cylindrical, diameter 1.2 m, depth 0.9 m
  • Vacuum system: diffusion pump with nitrogen cryo trap
  • Ultimate vacuum of <10-4 Pa (after 30 min)
  • Sample form:
    - Band (1m x 0,2 m)
    - Flat material (0,1m x 0,3 m)
    - Bulk
    - Wire (Cycle)


Highlights

Combination of

  • Plasma cleaning AEGD, glow discharge
  • Jet and thermal evaporator
  • Vacuum arc coating (high-current arc HCA) 50 kW
  • Electron beam vapor deposition (EB) 40 kW
  • Activated coating (HCA + EB)
  • In-situ thermal treatment
  • Adjustable gas composition


Simulation strip run

  • Speed ​​up to 1 m / s


Technology development

  • Coating of special geometries
  • Development of plasma sources


Film development

  • PVD deposition with adapted activation
  • Combined layers with different evaporators
  • Diffusion layers by in-situ thermal treatment