Composite coating system (OLGA)

Manufacturer

• Metaplas Ionon, Bergisch-Gladbach / von Ardenne Anlagentechnik, Dresden
  

Coating process

• Thermal evaporation
• Electron beam evaporation
• Vacuum arc coating

Technical data

• Chamber: cylindrical, diameter 1.2 m, depth 0.9 m
• Vacuum system: diffusion pump with nitrogen cryo trap
• Ultimate vacuum of <10-4 Pa (after 30 min)
• Sample form:
  - Band (1m x 0,2 m)
  - Flat material (0,1m x 0,3 m)
  - Bulk
  - Wire (Cycle)

Highlights

Combination of

• Plasma cleaning AEGD, glow discharge
• Jet and thermal evaporator
• Vacuum arc coating (high-current arc HCA) 50 kW
• Electron beam vapor deposition (EB) 40 kW
• Activated coating (HCA + EB)
• In-situ thermal treatment
• Adjustable gas composition

Simulation strip run

• Speed ​​up to 1 m / s
  

Technology development

• Coating of special geometries
• Development of plasma sources

Film development

• PVD deposition with adapted activation
• Combined layers with different evaporators
• Diffusion layers by in-situ thermal treatment