PVD coating system (MZR 323)

Manufacturer

• Sulzer Metaplas Ionon GmbH, Bergisch Gladbach

Specifications

• Chamber volume: 450 mm x 500 mm
• Pump system: Turbo pump system
• Final vacuum: 10-4 Pa
• Substrate holder: Planetary with triple rotation, lift table, special holders

Technical options

• Coating processes: vacuum arc coating with 4 circular evaporators in the wall
• Layer systems: metals, nitride hard materials
• Options: retrofitting of up to two laser-arc modules for Diamor deposition, installation of several sputtering sources for oxidic layers
• Use of filters for the vacuum arc coating for ultra plain layers
• Additional components for plasma cleaning (arc enhanced glow discharge AEGD)
• Fully automatic process management
• Deposition rate for vacuum arc deposition: 1.5 microns / h in triple rotation

Applications

•  Wear protection for tools and components
•  Metallization
•  Decorative coatings
•  Special applications (solder layers, IR - Absorption)