Fraunhofer Institute for Material and Beam Technology IWS- Preparation of TEM foils with ion beam assisted preparation techniques
- High resolution imaging, nanodiffraction and EDX analytics for the characterization of thin film system with respect to:
- Coating structure, periodicity and growth
- Formation and development of defects
- Crystal structure of the individual layers
- Analysis of interface properties
- Flatness
- Interdiffusion zones
- Strategy development to optimize the coating process