Producer / type
- 3 scanning electron microscopes (Fa. JEOL): JSM-7800F, JSM-6610 LV, JIB-4610F
Equipment / technical data
- Thermal in-lens field emission cathode with probe currents up to 400 nA
- Acceleration voltage: 10 V to 30 kV
- Resolution: 0,7 nm for acceleration voltage up to 1 KV
- Detectors: Everhart-Thornley SE, in-lens SE and BSE, BSE-detector with high resolution, STEM
- 5 axis stage and big sample chamber
- “Low-Vacuum”- operation for analysis of low conducting specimens
- Energy-dispersive and wavelength-dispersive X-ray spectroscopy (EDX and WDX) by Oxford Instruments
- EBSD detector for local orientation and phase analysis
Application areas
- High resolution scanning electron micrographs of sample surfaces and cross sections
- Analysis of diverse structure specifications of metallic and non-metallic materials (phase composition, …)
- High resolution analysis of thin films and modified surface zones
- Fractography
- Determination of chemical composition including light elements (B,C,N,O) with high local resolution
- 3D-analysis of materials, thermography and 3D-reconstructions; in each case possible to combine with EDX- and EBSD-analysis