Plasma processing at atmospheric pressure is used for cleaning, activation and modification of surfaces. With LARGE plasma sources surfaces of polymers, steel, metals in general and glass are treated.
The desired effect is achieved by carefully selecting the plasma gases Ar + N2, O2, CO2 and H2. In addition it is possible to feed precursors, reactive and other gases remotely to the process. This is achieved through an extra flange that is not in contact with the plasma source. This approach extends the surface treatment capabilities of the system. An example is the functionalization of polymeric surfaces. Chemicals such as ethyl acetate, acetic acid or ethyl glycol are remotely fed into the afterglow. The LARGE plasma source can selectively generate functional groups such as -OH and -C=O. These groups change surface polarity and chemistry and thus its wettability.