Large area deposition of conducting and insulating layers at atmospheric pressure

Large-area deposition of extremely thin layers via ultrasonic excitation
© Fraunhofer IWS Dresden
Large-area deposition of extremely thin layers via ultrasonic excitation

Thin layers are applied on planar substrates using spray-pyrolysis processes. By this means homogeneous layers with excellent properties, e.g. consisting of doped aluminum or zinc oxide, can be deposited. Furthermore it is possible to deposit extremely thin and electro-conductive layers based on carbon nanostructures such as carbon nanotubes (CNTs) or graphene as well.

In the laboratory we are able to coat substrates up to a size of 156 by 156 mm2. Possible applications are the passivation of solar cells or the fabrication of transparent conductive layers.