High current pulsed arc (HCA) with plasma filter

High current pulsed arc (HCA) with plasma filter

HCA-filter module for the hard disk coating
© Fraunhofer IWS Dresden
HCA-filter module for the hard disk coating

Special plasma properties, e.g. a large amount of multiple charged ions or very high kinetic ion energies can be achieved with the pulsed high current arc (high-current arc - HCA), developed at the IWS. Extremely dense and precise layers can be fabricated in combination with an electromagnetic particle filter, which, e.g., can be found in many microsystem technology applications.