Electron beam evaporation

Electron beam evaporation

Metallverdampfung mittels Elektronenstrahltechnologie
© Fraunhofer IWS Dresden
Metallverdampfung mittels Elektronenstrahltechnologie

Nearly almost all materials can be evaporated using a high-energy electron beam. The electron beam is a useful alternative to other PVD processes, especially for those cases, in which high deposition rates are required (eg for metal layers). Layer structures can be precisely adjusted in combination with an effective plasma excitation. For these purpose a pilot plant with a 40 kW electron beam gun is available in the IWS.