Materials- and microstructural characterizations using Focused Ion Beam (FIB) und high resolution Scanning Electron Microscopy (HR-SEM)

Geometry of ion beam and electron beam, EDX and EBSD analysis systems and sample
© Fraunhofer IWS Dresden
Geometry of ion beam and electron beam, EDX and EBSD analysis systems and sample
Color-coded 3D representation of the crystal orientations of a Sn-Cu-Ag alloy
© Fraunhofer IWS Dresden
Color-coded 3D representation of the crystal orientations of a Sn-Cu-Ag alloy
  • Extension of established methods of cross-section preparation and their area-based mapping into tomographic 3D imaging and analysis; especially for the analysis of anisotropic structures in composite and gradient materials as well as in coated systems
  • Use of a FIB / SEM dual-beam system equipped with detectors for secondary, backscattered and transmitted electrons, chemical composition analysis (EDX) and crystal orientation analysis (EBSD) as well as a micromanipulator
  • Special system geometry enables successive preparation and measuring processes without sample movement and thus with high speed and accuracy
  • 3D information of the microstructure including grain size, grain orientation, phases, chemical composition and defects with max. resolution of 10 nm