Trace gas sensor for the simultaneous detection of up to 3 gases within the ppm- to ppb-range
The use of the diode laser enables the simultaneous detection of gas impurities in bulk or special gases. This system allows a continuous gas quality monitoring in circular supply systems or at the point-of-use in the semi-conducting industry. The device has been developed to monitor humid-, oxygen- and methane traces in any matrix gases. However, this system can be adjusted to many other gases as well.