ISPROM

ISPROM

In-situ mit FTIR-Spektroskopie gewonnene Konzentrationsverläufe prozeßbeteiligter Gasspezies
© Photo Fraunhofer IWS Dresden

Concentration curves of involved gas species, gained by the help of FTIR spectroscopy

FTIR gas analytics systems for the time-resolved determination of gas atmospheres and the concentration flow of the gas species (precursors, intermediate) even in highly particle loaded atmospheres. The system has been developed for applications in CVD coating and etching industries as well as in the semi-conducting industry.